dc.contributor.author | Teugels, Lieve | |
dc.date.accessioned | 2021-10-26T05:28:11Z | |
dc.date.available | 2021-10-26T05:28:11Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31928 | |
dc.source | IIOimport | |
dc.title | CMP process: optimization, analysis and challenges | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Teugels, Lieve | |
dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
dc.source.peerreview | no | |
dc.source.conference | ASML Patterning Technical Meeting | |
dc.source.conferencedate | 10/12/2018 | |
dc.source.conferencelocation | ? ? | |
imec.availability | Published - imec | |