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Conductor trends for future interconnects

dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-26T05:45:04Z
dc.date.available2021-10-26T05:45:04Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31954
dc.sourceIIOimport
dc.titleConductor trends for future interconnects
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.source.peerreviewyes
dc.source.beginpage465
dc.source.endpage466
dc.source.conference50th International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate9/09/2018
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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