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A new dummy-free shallow trench isolation concept for mixed-signal applications

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorVandamme, Ewout
dc.contributor.authorPerello, Carles
dc.contributor.authorHeylen, Nancy
dc.contributor.authorGrillaert, Joost
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-10-06T10:41:15Z
dc.date.available2021-10-06T10:41:15Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3198
dc.sourceIIOimport
dc.titleA new dummy-free shallow trench isolation concept for mixed-signal applications
dc.typeProceedings paper
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage231
dc.source.endpage241
dc.source.conferenceULSI Process Integration. Proceedings of the First International Symposium
dc.source.conferencedate17/10/1999
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 99-18


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