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The transformation behaviour of "alucones" deposited by molecular layer deposition, in nanoporous Al2O3 layers
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Authors
Van de Kerckhove, Kevin
;
Barr, Maïssa
;
Santinacci, Lionel
;
Vereecken, Philippe
;
Dendooven, Jolien
;
Detavernier, Christophe
ISSN
1477-9226
Issue
16
Journal
Dalton Transactions
Volume
47
Title
The transformation behaviour of "alucones" deposited by molecular layer deposition, in nanoporous Al2O3 layers
Publication type
Journal article
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