Development of a non-destructive thin film porosimetry: pore size distribution and pore volume of porous silica
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Dultsev, F. N. | |
dc.contributor.author | Kondoh, Eiichi | |
dc.contributor.author | Mogilnikov, K. P. | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Wang, Sharon | |
dc.contributor.author | Forester, Lynn | |
dc.date.accessioned | 2021-10-06T10:41:32Z | |
dc.date.available | 2021-10-06T10:41:32Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3207 | |
dc.source | IIOimport | |
dc.title | Development of a non-destructive thin film porosimetry: pore size distribution and pore volume of porous silica | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.beginpage | 507 | |
dc.source.endpage | 512 | |
dc.source.conference | Advanced Metallization Conference in 1998. Proceedings of the Conference; | |
imec.availability | Published - imec |
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