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Challenges for chemical processing of high aspect ratio nanostructures

dc.contributor.authorVereecke, Guy
dc.date.accessioned2021-10-26T08:23:26Z
dc.date.available2021-10-26T08:23:26Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32183
dc.sourceIIOimport
dc.titleChallenges for chemical processing of high aspect ratio nanostructures
dc.typeMeeting abstract
dc.contributor.imecauthorVereecke, Guy
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceSEMICON Korea - S5. Contamination-free Manufacturing and CMP Technology
dc.source.conferencedate31/01/2018
dc.source.conferencelocationSeoul South Korea
imec.availabilityPublished - imec


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