Dry removal of a surface functionalization chemistry used for pattern collapse prevention

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Authors
Vereecke, Guy; Komori, Kana; Nakano, Yuta; Sebaai, Farid; Xu, XiuMei; Oniki, Yusuke; Holsteyns, Frank
Conference
Surface Preparation & Cleaning Conference - SPCC
Title
Dry removal of a surface functionalization chemistry used for pattern collapse prevention
Publication type
Meeting abstract
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