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Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera

dc.contributor.authorVogt, Ivo
dc.contributor.authorNakamura, T.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBoit, Christian
dc.date.accessioned2021-10-26T08:49:44Z
dc.date.available2021-10-26T08:49:44Z
dc.date.issued2018
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32219
dc.sourceIIOimport
dc.titleDetection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage334
dc.source.endpage338
dc.source.journalMicroelectronics Reliability
dc.source.volume88-90
dc.identifier.urlhttps://doi.org/10.1016/j.microrel.2018.06.080
imec.availabilityPublished - open access
imec.internalnotes29th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis


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