Authors

Vohra, Anurag; Khanam, Afrina; Slotte, Jonatan; Makkonen, Ilja; Loo, Roger; Pourtois, Geoffrey; Vandervorst, Wilfried

Conference

eMRS 2018 Fall Meeting, Symposium U: Monolithic and Heterogeneous Integration of Advanced Materials & Devices on Silicon

Title

Evolution of phosphorus-vacancy clusters in germanium

Publication type

Meeting abstract