dc.contributor.author | Vos, Rita | |
dc.contributor.author | Steylaerts, Tim | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Stakenborg, Tim | |
dc.contributor.author | Jans, Karolien | |
dc.date.accessioned | 2021-10-26T08:54:46Z | |
dc.date.available | 2021-10-26T08:54:46Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32226 | |
dc.source | IIOimport | |
dc.title | Vapor-phase deposition of N3-containing monolayers on SiO2 and Si3N4 for wafer scale biofunctionalization | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vos, Rita | |
dc.contributor.imecauthor | Steylaerts, Tim | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Stakenborg, Tim | |
dc.contributor.imecauthor | Jans, Karolien | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Stakenborg, Tim::0000-0001-9878-9078 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 31 | |
dc.source.endpage | 36 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS | |
dc.source.conferencedate | 3/09/2018 | |
dc.source.conferencelocation | Leuven Belgium | |
dc.identifier.url | https://www.scientific.net/SSP.282.31 | |
imec.availability | Published - imec | |
imec.internalnotes | Solid State Phenomena; Vol. 282 | |