Process control of tungsten beta-phase window for spin-orbit torques MRAM applications

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Authors
Vudya Sethu, Kiran Kumar; Ghosh, Sambit; Couet, Sebastien; Swerts, Johan; Soree, Bart; De Boeck, Jo; Kar, Gouri Sankar; Garello, Kevin
Conference
Joint European Magnetic Symposia. 9th JEMS Conference
Title
Process control of tungsten beta-phase window for spin-orbit torques MRAM applications
Publication type
Oral presentation
Embargo date
9999-12-31
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