Show simple item record

Subtractive etch of ruthenium for sub-5nm interconnect

dc.contributor.authorWan, Danny
dc.contributor.authorPaolillo, Sara
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorKutrzeba Kotowska, Bogumila
dc.contributor.authorBlanco, Victor
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorErcken, Monique
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-26T09:05:10Z
dc.date.available2021-10-26T09:05:10Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32240
dc.sourceIIOimport
dc.titleSubtractive etch of ruthenium for sub-5nm interconnect
dc.typeProceedings paper
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorKutrzeba Kotowska, Bogumila
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage10
dc.source.endpage12
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8454841
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
38700.pdf
Size:
1.936Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record