Nonlinear silicon nitride waveguides based on a PECVD deposition platform

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Authors

Wang, Linghua; Xie, Weiqiang; Van Thourhout, Dries; Zhang, Yazhen; Yu, Hui; Wang, Shaohao

ISSN

1094-4087

Issue

8

Journal

Optics Express

Volume

26

Title

Nonlinear silicon nitride waveguides based on a PECVD deposition platform

Publication type

Journal article

Embargo date

9999-12-31

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