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Nonlinear silicon nitride waveguides based on a PECVD deposition platform

dc.contributor.authorWang, Linghua
dc.contributor.authorXie, Weiqiang
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorZhang, Yazhen
dc.contributor.authorYu, Hui
dc.contributor.authorWang, Shaohao
dc.date.accessioned2021-10-26T09:05:56Z
dc.date.available2021-10-26T09:05:56Z
dc.date.issued2018-04
dc.identifier.issn1094-4087
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32241
dc.sourceIIOimport
dc.titleNonlinear silicon nitride waveguides based on a PECVD deposition platform
dc.typeJournal article
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage9645
dc.source.endpage9654
dc.source.journalOptics Express
dc.source.issue8
dc.source.volume26
dc.identifier.urlhttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-26-8-9645
imec.availabilityPublished - open access


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