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Improved ohmic performance by the metallic bilayer contact stack of oxygen-incorporated La/ultrathin TiSi on n-Si
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Authors
Wang, Linlin
;
Yu, Hao
;
Schaekers, Marc
;
Everaert, Jean-Luc
;
Mocuta, Dan
;
Horiguchi, Naoto
;
Collaert, Nadine
;
De Meyer, Kristin
;
Jiang, Yu-long
ISSN
0018-9383
Issue
5
Journal
IEEE Transactions on Electron Devices
Volume
65
Title
Improved ohmic performance by the metallic bilayer contact stack of oxygen-incorporated La/ultrathin TiSi on n-Si
Publication type
Journal article
Embargo date
9999-12-31
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