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Bare wafer analysis for wet cleaning efficiency – The impact of classification and sensitivity
Publication:
Bare wafer analysis for wet cleaning efficiency – The impact of classification and sensitivity
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wendt, Kay
;
Wilbers, Fabian
;
Ruth, Jochen
;
Lorant, Christophe
;
Holsteyns, Frank
;
Newby, John
;
Bast, Gerhard
;
Sundar, Vignesh
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1997
since deposited on 2021-10-26
Acq. date: 2025-12-16
Citations
Metrics
Views
1997
since deposited on 2021-10-26
Acq. date: 2025-12-16
Citations