Authors

Wendt, Kay; Wilbers, Fabian; Ruth, Jochen; Lorant, Christophe; Holsteyns, Frank; Newby, John; Bast, Gerhard; Sundar, Vignesh

Conference

29th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC

Title

Bare wafer analysis for wet cleaning efficiency – The impact of classification and sensitivity

Publication type

Proceedings paper

Embargo date

9999-12-31