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Testing the limits of TaN barrier scaling

dc.contributor.authorWitt, Christian
dc.contributor.authorYeap, K.B.
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorWan, Danny
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorCiofi, Ivan
dc.contributor.authorWu, Chen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-26T09:31:57Z
dc.date.available2021-10-26T09:31:57Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32277
dc.sourceIIOimport
dc.titleTesting the limits of TaN barrier scaling
dc.typeMeeting abstract
dc.contributor.imecauthorWitt, Christian
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage54
dc.source.endpage56
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8430289/
imec.availabilityPublished - open access


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