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Mobility and carrier concentration measurements on nm-wide semiconductor fins

dc.contributor.authorWitthoft, M.-L.
dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMarangoni, T.
dc.contributor.authorVohra, Anurag
dc.contributor.authorPorret, Clément
dc.contributor.authorLoo, Roger
dc.contributor.authorHenrichsen, H.H.
dc.contributor.authorHansen, O.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPetersen, D.H.
dc.date.accessioned2021-10-26T09:32:44Z
dc.date.available2021-10-26T09:32:44Z
dc.date.issued2018-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32278
dc.sourceIIOimport
dc.titleMobility and carrier concentration measurements on nm-wide semiconductor fins
dc.typeMeeting abstract
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVohra, Anurag
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecVohra, Anurag::0000-0002-2831-0719
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpageI.15.3
dc.source.conferenceE-MRS Spring Meeting Symposium I: Materials Research for Group IV Semiconductors: Growth, Characterization and Technological ...
dc.source.conferencedate18/06/2018
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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