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Investigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 background

dc.contributor.authorBender, Hugo
dc.contributor.authorJin, S.
dc.contributor.authorVervoort, Iwan
dc.contributor.authorLantasov, Yuri
dc.date.accessioned2021-10-06T10:42:32Z
dc.date.available2021-10-06T10:42:32Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3228
dc.sourceIIOimport
dc.titleInvestigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 background
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage135
dc.source.endpage140
dc.source.conferenceProceedings from the 25th International Symposium for Testing and Failure Analysis
dc.source.conferencedate14/11/1999
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access


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