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Accurate extraction of fabricated geometry using optical meuasurement

dc.contributor.authorXing, Yufei
dc.contributor.authorDong, Jiaxing
dc.contributor.authorDwivedi, Sarvagya
dc.contributor.authorKhan, Umar
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-26T09:49:22Z
dc.date.available2021-10-26T09:49:22Z
dc.date.issued2018-10
dc.identifier.issn2327-9125
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32300
dc.sourceIIOimport
dc.titleAccurate extraction of fabricated geometry using optical meuasurement
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1008
dc.source.endpage1020
dc.source.journalPhotonics Research
dc.source.issue11
dc.source.volume6
dc.identifier.urlhttps://doi.org/10.1364/PRJ.6.001008
imec.availabilityPublished - open access


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