Accurate extraction of fabricated geometry using optical meuasurement

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Authors

Xing, Yufei; Dong, Jiaxing; Dwivedi, Sarvagya; Khan, Umar; Bogaerts, Wim

ISSN

2327-9125

Issue

11

Journal

Photonics Research

Volume

6

Title

Accurate extraction of fabricated geometry using optical meuasurement

Publication type

Journal article

Embargo date

9999-12-31

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Articles