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Articles
Accurate extraction of fabricated geometry using optical meuasurement
Publication:
Accurate extraction of fabricated geometry using optical meuasurement
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xing, Yufei
;
Dong, Jiaxing
;
Dwivedi, Sarvagya
;
Khan, Umar
;
Bogaerts, Wim
Journal
Photonics Research
Abstract
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1964
since deposited on 2021-10-26
Acq. date: 2026-07-21
Citations
Statistics
Views
1964
since deposited on 2021-10-26
Acq. date: 2026-07-21
Citations