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Accurate extraction of fabricated geometry using optical meuasurement
Publication:
Accurate extraction of fabricated geometry using optical meuasurement
Date
2018-10
Journal article
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40433.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xing, Yufei
;
Dong, Jiaxing
;
Dwivedi, Sarvagya
;
Khan, Umar
;
Bogaerts, Wim
Journal
Photonics Research
Abstract
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1960
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Acq. date: 2025-10-25
Citations
Metrics
Views
1960
since deposited on 2021-10-26
458
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations