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IMP liners for Al via speed fill

dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.contributor.authorDaniels, Stephen
dc.contributor.authorMaity, Nirmalya
dc.contributor.authorBassanini, Davide
dc.date.accessioned2021-10-06T10:42:42Z
dc.date.available2021-10-06T10:42:42Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3231
dc.sourceIIOimport
dc.titleIMP liners for Al via speed fill
dc.typeProceedings paper
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage433
dc.source.endpage435
dc.source.conferenceAdvanced Metallization Conference in 1998- AMC 1998
dc.source.conferencedate6/10/1998
dc.source.conferencelocationColorado Springs, CO USA
imec.availabilityPublished - open access


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