Authors

Yu, Hao; Schaekers, Marc; Chew, Soon Aik; Everaert, Jean-Luc; Dabral, Ashish; Pourtois, Geoffrey; Horiguchi, Naoto; Mocuta, Dan; Collaert, Nadine; De Meyer, Kristin

Conference

18th International Workshop on Junction Technology - IWJT

Title

Titanium (germano-)silicides featuring 10-9 $Xcm2 contact resistivity and improved compatibility to advanced CMOS technology

Publication type

Proceedings paper

Embargo date

9999-12-31