Publication:
Titanium (germano-)silicides featuring 10-9 $Xcm2 contact resistivity and improved compatibility to advanced CMOS technology
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1974 since deposited on 2021-10-26
3last month
2last week
Acq. date: 2026-10-13
Citations
Statistics
Views
1974 since deposited on 2021-10-26
3last month
2last week
Acq. date: 2026-10-13
Citations