Thermal stability of TiN/Ti/p+-Si0.3Ge0.7 contact with ultralow contact resistivity

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Authors

Zhang, Jian; Yu, Hao; Wang, Linlin; Schaekers, Marc; Mocuta, Dan; Horiguchi, Naoto; Collaert, Nadine; De Meyer, Kristin; Jiang, Yu-long

ISSN

0741-3106

Issue

1

Journal

IEEE Electron Device Letters

Volume

39

Title

Thermal stability of TiN/Ti/p+-Si0.3Ge0.7 contact with ultralow contact resistivity

Publication type

Journal article

Embargo date

9999-12-31

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