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HfZrO ferroelectric characterization and parameterization of response to arbitrary excitation waveform
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Authors
Alam, Md Nur Kutubul
;
Thesberg, Mischa
;
Kaczer, Ben
;
Roussel, Philippe
;
Vermeulen, Bart
;
Truijen, Brecht
;
Popovici, Mihaela Ioana
;
Ragnarsson, Lars-Ake
;
Horiguchi, Naoto
;
Heyns, Marc
;
Van Houdt, Jan
Conference
2019 S3S Conference. SOI-3D-Subthreshold Microelectronics Technology Unified Conference
Title
HfZrO ferroelectric characterization and parameterization of response to arbitrary excitation waveform
Publication type
Proceedings paper
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