Improvement of conduction in 3D NAND memory devices by channel and junction optimization

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Authors
Arreghini, Antonio; Banerjee, Kaustuv; Verreck, Devin; Vadakupudhu Palayam, Senthil; Rosseel, Erik; Nyns, Laura; Van den Bosch, Geert; Furnemont, Arnaud
Conference
IEEE 11th International Memory Workshop 2019
Title
Improvement of conduction in 3D NAND memory devices by channel and junction optimization
Publication type
Proceedings paper
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