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Selective wet-etching of silicon germanium in composite vertical nanowires

dc.contributor.authorBaraissov, Zhaslan
dc.contributor.authorPacco, Antoine
dc.contributor.authorKoneti, Siddardha
dc.contributor.authorBisht, Geeta
dc.contributor.authorPanciera, Federico
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorMirsaidov, Utkur
dc.date.accessioned2021-10-27T07:29:39Z
dc.date.available2021-10-27T07:29:39Z
dc.date.issued2019
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32492
dc.sourceIIOimport
dc.titleSelective wet-etching of silicon germanium in composite vertical nanowires
dc.typeJournal article
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHolsteyns, Frank
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage36839
dc.source.endpage36846
dc.source.journalACS Applied Materials & Interfaces
dc.source.issue40
dc.source.volume11
dc.identifier.urlhttps://doi.org/10.1021/acsami.9b11934
imec.availabilityPublished - open access


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