Selective wet-etching of silicon germanium in composite vertical nanowires

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Authors

Baraissov, Zhaslan; Pacco, Antoine; Koneti, Siddardha; Bisht, Geeta; Panciera, Federico; Holsteyns, Frank; Mirsaidov, Utkur

ISSN

1944-8244

Issue

40

Journal

ACS Applied Materials & Interfaces

Volume

11

Title

Selective wet-etching of silicon germanium in composite vertical nanowires

Publication type

Journal article

Embargo date

9999-12-31

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