Publication:

Selective wet-etching of silicon germanium in composite vertical nanowires

Date

2019
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorBaraissov, Zhaslan
dc.contributor.authorPacco, Antoine
dc.contributor.authorKoneti, Siddardha
dc.contributor.authorBisht, Geeta
dc.contributor.authorPanciera, Federico
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorMirsaidov, Utkur
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHolsteyns, Frank
dc.date.accessioned2021-10-27T07:29:39Z
dc.date.available2021-10-27T07:29:39Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32492
dc.identifier.urlhttps://doi.org/10.1021/acsami.9b11934
dc.source.beginpage36839
dc.source.endpage36846
dc.source.issue40
dc.source.journalACS Applied Materials & Interfaces
dc.source.volume11
dc.title

Selective wet-etching of silicon germanium in composite vertical nanowires

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
43173.pdf
Size:
1.86 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles