dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Bosch, Eric G.T. | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Mendez, David | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Lazic, Ivan | |
dc.date.accessioned | 2021-10-27T07:32:27Z | |
dc.date.available | 2021-10-27T07:32:27Z | |
dc.date.issued | 2019 | |
dc.identifier.issn | 0268-1242 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32521 | |
dc.source | IIOimport | |
dc.title | 3D characterization of nanowire devices with STEM based modes | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 114001 | |
dc.source.journal | Semiconductor Science and Technology | |
dc.source.issue | 11 | |
dc.source.volume | 34 | |
dc.identifier.url | https://doi.org/10.1088/1361-6641/ab4564 | |
imec.availability | Published - imec | |