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3D characterization of nanowire devices with STEM based modes

dc.contributor.authorBender, Hugo
dc.contributor.authorBosch, Eric G.T.
dc.contributor.authorRichard, Olivier
dc.contributor.authorMendez, David
dc.contributor.authorFavia, Paola
dc.contributor.authorLazic, Ivan
dc.date.accessioned2021-10-27T07:32:27Z
dc.date.available2021-10-27T07:32:27Z
dc.date.issued2019
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32521
dc.sourceIIOimport
dc.title3D characterization of nanowire devices with STEM based modes
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorFavia, Paola
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.source.peerreviewyes
dc.source.beginpage114001
dc.source.journalSemiconductor Science and Technology
dc.source.issue11
dc.source.volume34
dc.identifier.urlhttps://doi.org/10.1088/1361-6641/ab4564
imec.availabilityPublished - imec


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