3D characterization of nanowire devices with STEM based modes

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Authors

Bender, Hugo; Bosch, Eric G.T.; Richard, Olivier; Mendez, David; Favia, Paola; Lazic, Ivan

ISSN

0268-1242

Issue

11

Journal

Semiconductor Science and Technology

Volume

34

Title

3D characterization of nanowire devices with STEM based modes

Publication type

Journal article

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