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Combined STEM-EDS tomography of nanowire structures

dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorKundu, Paromita
dc.contributor.authorFavia, Paola
dc.contributor.authorZhong, Zhichao
dc.contributor.authorPalenstijn, Willem Jan
dc.contributor.authorBatenburg, Kees Joost
dc.contributor.authorWirix, Maarten
dc.contributor.authorKohr, Holger
dc.contributor.authorSchoenmakers, Remco
dc.date.accessioned2021-10-27T07:32:46Z
dc.date.available2021-10-27T07:32:46Z
dc.date.issued2019
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32524
dc.sourceIIOimport
dc.titleCombined STEM-EDS tomography of nanowire structures
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorFavia, Paola
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.source.peerreviewyes
dc.source.beginpage114002-1
dc.source.endpage114002-12
dc.source.journalSemiconductor Science and Technology
dc.source.issue11
dc.source.volume34
dc.identifier.urlhttps://doi.org/10.1088/1361-6641/ab4840
imec.availabilityPublished - imec


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