Low temperature junctionless device stacking enabled by leading edge

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Authors
Besnard, Guillaume; Gaudin, Gweltaz; Schwarzenbach, Walter; Ecarnot, Ludovic; Radu, Ioniut; Nguyen, Bich-Yen; Vandooren, Anne; Collaert, Nadine
Conference
2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)
Title
Low temperature junctionless device stacking enabled by leading edge
Publication type
Meeting abstract
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