Effect of sub-10nm fin-widths on the analog performance of FinFETs

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Authors
Bhoir, Mandar; Nihar, Mohapatra; Chiarella, Thomas; Ragnarsson, Lars-Ake; Mitard, Jerome; Terzieva, Valentina; Horiguchi, Naoto
Conference
EDTM 2019 Electron Devices Technology and Manufacturing Conference
Title
Effect of sub-10nm fin-widths on the analog performance of FinFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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