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Performance of CMOS-compatible Scandium AIN PMUT for imaging applications

dc.contributor.authorBillen, Margo
dc.contributor.authorGao, Hang
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorMarigó, Eloi
dc.contributor.authorBinti Roslan, Shazwani
dc.contributor.authorHalbach, Alexandre
dc.contributor.authorBarniol, Nuria
dc.contributor.authorMazzalai, Andrea
dc.contributor.authorSoundara-Pandian, Mohan
dc.contributor.authorHelin, Philippe
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-27T07:35:49Z
dc.date.available2021-10-27T07:35:49Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32551
dc.sourceIIOimport
dc.titlePerformance of CMOS-compatible Scandium AIN PMUT for imaging applications
dc.typeMeeting abstract
dc.contributor.imecauthorBillen, Margo
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorHalbach, Alexandre
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecBillen, Margo::0000-0002-0189-7388
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.source.peerreviewyes
dc.source.beginpageTuORi5A.3
dc.source.conferenceF2CP2 2019
dc.source.conferencedate15/07/2019
dc.source.conferencelocationLausanne Switserland
dc.identifier.urlhttps://conf.papercept.net/conferences/conferences/ISAF19/program/ISAF19_ContentListWeb_3.html
imec.availabilityPublished - imec


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