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Interconnects for scaled SRAM with vertical Surrounded Gate Transistors (SGT)

dc.contributor.authorBoemmels, Juergen
dc.contributor.authorHarada, N.
dc.contributor.authorKim, Min-Soo
dc.contributor.authorMitard, Jerome
dc.contributor.authorKikuchi, Yoshiaki
dc.contributor.authorLi, Waikin
dc.contributor.authorTao, Zheng
dc.contributor.authorPuliyalil, Harinarayanan
dc.contributor.authorDevriendt, Katia
dc.contributor.authorLorant, Christophe
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorTeugels, Lieve
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorLi, Y.
dc.contributor.authorNakamura, H.
dc.contributor.authorMocuta, Dan
dc.contributor.authorMasuoka, F.
dc.date.accessioned2021-10-27T07:38:53Z
dc.date.available2021-10-27T07:38:53Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32575
dc.sourceIIOimport
dc.titleInterconnects for scaled SRAM with vertical Surrounded Gate Transistors (SGT)
dc.typeProceedings paper
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorKikuchi, Yoshiaki
dc.contributor.imecauthorLi, Waikin
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorPuliyalil, Harinarayanan
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecPuliyalil, Harinarayanan::0000-0002-9749-5307
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewyes
dc.source.beginpage2.5
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
imec.availabilityPublished - imec


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