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Interaction of the sulphuric acid hydrogen peroxide mixture with silicon surfaces

dc.contributor.authorRotondaro, Antonio
dc.contributor.authorSchmidt, Harald
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorClaeys, Cor
dc.contributor.authorMulready, J.
dc.date.accessioned2021-09-29T12:46:32Z
dc.date.available2021-09-29T12:46:32Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/325
dc.sourceIIOimport
dc.titleInteraction of the sulphuric acid hydrogen peroxide mixture with silicon surfaces
dc.typeProceedings paper
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage301
dc.source.endpage304
dc.source.conferenceProceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate19/09/1994
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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