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The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition

dc.contributor.authorBrady-Boyle, Anita
dc.contributor.authorO'Connor, Robert
dc.contributor.authorArmini, Silvia
dc.contributor.authorSelvaraju, V
dc.contributor.authorBogan, Justin
dc.date.accessioned2021-10-27T07:43:50Z
dc.date.available2021-10-27T07:43:50Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32609
dc.sourceIIOimport
dc.titleThe role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage56
dc.source.conferenceISSC-22 Interdisciplinary Surface Science Conference 2019
dc.source.conferencedate15/04/2019
dc.source.conferencelocationSwansea UK
dc.identifier.urlhttps://www.iopconferences.org/IOP/media/uploaded/EVIOP/event_1193/Abstract_book_FINAL.pdf
imec.availabilityPublished - imec


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