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Backside power delivery as a scaling knob for future systems

dc.contributor.authorChava, Bharani
dc.contributor.authorShaik, Khaja Ahmad
dc.contributor.authorJourdain, Anne
dc.contributor.authorGuissi, Sofiane
dc.contributor.authorWeckx, Pieter
dc.contributor.authorRyckaert, Julien
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorSpessot, Alessio
dc.contributor.authorBeyne, Eric
dc.contributor.authorMocuta, Anda
dc.date.accessioned2021-10-27T07:58:25Z
dc.date.available2021-10-27T07:58:25Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32688
dc.sourceIIOimport
dc.titleBackside power delivery as a scaling knob for future systems
dc.typeMeeting abstract
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorGuissi, Sofiane
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1096205
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIII
dc.source.conferencedate25/02/2019
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2514942
imec.availabilityPublished - open access


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