CDM-time domain turn-on transient of ESD diodes in bulk FinFET and GAA NW technologies

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Authors
Chen, Shih-Hung; Linten, Dimitri; Hellings, Geert; Simicic, Marko; Kaczer, Ben; Chiarella, Thomas; Mertens, Hans; Mitard, Jerome; Mocuta, Anda; Horiguchi, Naoto
Conference
2019 IEEE International Reliability Physics Symposium (IRPS)
Title
CDM-time domain turn-on transient of ESD diodes in bulk FinFET and GAA NW technologies
Publication type
Meeting abstract
Embargo date
9999-12-31
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