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Advanced capabilities and applications of a sputter-RBS system

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-06T10:45:31Z
dc.date.available2021-10-06T10:45:31Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3270
dc.sourceIIOimport
dc.titleAdvanced capabilities and applications of a sputter-RBS system
dc.typeProceedings paper
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage586
dc.source.endpage591
dc.source.conferenceApplications of Accelerators in Research and Industry: Proceedings of the 15th International Conference
dc.source.conferencedate4/11/1998
dc.source.conferencelocationDenton, TX USA
imec.availabilityPublished - open access
imec.internalnotesAIP Conference Proceedings; Vol. CP475


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