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Articles
Low-frequency noise assessment of work function engineering cap layers in high-k gate stacks
Publication:
Low-frequency noise assessment of work function engineering cap layers in high-k gate stacks
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Date
2019
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
Ritzenthaler, Romain
;
Schram, Tom
;
Arimura, Hiroaki
;
Horiguchi, Naoto
;
Simoen, Eddy
Journal
ECS Journal of Solid State Science and Technology
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1924
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Acq. date: 2025-12-16
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1924
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-16
Citations