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Low-frequency noise assessment of work function engineering cap layers in high-k gate stacks

dc.contributor.authorClaeys, Cor
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-27T08:05:25Z
dc.date.available2021-10-27T08:05:25Z
dc.date.issued2019
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32720
dc.sourceIIOimport
dc.titleLow-frequency noise assessment of work function engineering cap layers in high-k gate stacks
dc.typeJournal article
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageN25
dc.source.endpageN31
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue2
dc.source.volume8
dc.identifier.urlhttp://jss.ecsdl.org/content/8/2/N25.abstract
imec.availabilityPublished - open access


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