Material relaxation in chalcogenide OTS SELECTOR materials

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Authors

Clima, Sergiu; Garbin, Daniele; Devulder, Wouter; Keukelier, Jonas; Opsomer, Karl; Goux, Ludovic; Kar, Gouri Sankar; Pourtois, Geoffrey

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

215

Title

Material relaxation in chalcogenide OTS SELECTOR materials

Publication type

Journal article

Embargo date

9999-12-31

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