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Achieving reproducible data: examples from surface analysis in semiconductor technology

dc.contributor.authorConard, Thierry
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVanleenhove, Anja
dc.contributor.authorZborowski, Charlotte
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-27T08:09:18Z
dc.date.available2021-10-27T08:09:18Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32737
dc.sourceIIOimport
dc.titleAchieving reproducible data: examples from surface analysis in semiconductor technology
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVanleenhove, Anja
dc.contributor.imecauthorZborowski, Charlotte
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.beginpageRA+AS+BI-WeA2
dc.source.conferenceAVS 66th International Symposium & Exhibition
dc.source.conferencedate20/10/2019
dc.source.conferencelocationColumbus, OH USA
dc.identifier.urlhttps://www2.avs.org/symposium2019/Papers/Paper_RA+AS+BI-WeA2.html
imec.availabilityPublished - imec


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