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Understanding EM-degradation mechanisms in metal heaters used for Si Photonics applications

dc.contributor.authorCroes, Kristof
dc.contributor.authorSimons, Veerle
dc.contributor.authorCherman, Vladimir
dc.contributor.authorOprins, Herman
dc.contributor.authorAbsil, Philippe
dc.contributor.authorGlabman, Aaron
dc.contributor.authorEric, Wilcox
dc.date.accessioned2021-10-27T08:15:36Z
dc.date.available2021-10-27T08:15:36Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32764
dc.sourceIIOimport
dc.titleUnderstanding EM-degradation mechanisms in metal heaters used for Si Photonics applications
dc.typeProceedings paper
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conference2019 IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate31/03/2019
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8720604
imec.availabilityPublished - open access


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