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Texture control for Cu hybrid bonding pads using a PVD Cu process
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Authors
De Messemaeker, Joke
;
Jourdan, Nicolas
;
Nolmans, Philip
;
Kim, Soon-Wook
;
Beyer, Gerald
Conference
Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM
Title
Texture control for Cu hybrid bonding pads using a PVD Cu process
Publication type
Proceedings paper
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