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Fabrication of counter electrodes for scanning atomic probe

dc.contributor.authorCampitelli, Andrew
dc.contributor.authorZiad, Hocine
dc.contributor.authorRogge, Frank
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBaert, Kris
dc.contributor.authorHuang, M.
dc.contributor.authorCerezo, A.
dc.date.accessioned2021-10-06T10:47:05Z
dc.date.available2021-10-06T10:47:05Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3287
dc.sourceIIOimport
dc.titleFabrication of counter electrodes for scanning atomic probe
dc.typeProceedings paper
dc.contributor.imecauthorZiad, Hocine
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage138
dc.source.endpage149
dc.source.conferenceMicromachining and Microfabrication Process Technology V
dc.source.conferencedate20/09/1999
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3874


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