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Carrier profiling with Fast Fourier transform scanning spreading resistance microscopy: A case study for Ge, GaAs, InGaAs, and InP
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Authors
Dixon-Luinenburg, Oberon
;
Celano, Umberto
;
Vandervorst, Wilfried
;
Paredis, Kristof
ISSN
0304-3991
Journal
Ultramicroscopy
Volume
206
Title
Carrier profiling with Fast Fourier transform scanning spreading resistance microscopy: A case study for Ge, GaAs, InGaAs, and InP
Publication type
Journal article
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